教師資料查詢 | 類別: 期刊論文 | 教師: 彭維鋒 Pong, Way-faung (瀏覽個人網頁)

標題:Iron, nitrogen and silicon doped diamond like carbon (DLC) thin films: A comparative study
學年104
學期2
出版(發表)日期2016/07/01
作品名稱Iron, nitrogen and silicon doped diamond like carbon (DLC) thin films: A comparative study
作品名稱(其他語言)
著者Ray, S.C.; Pong, W.F.; Papakonstantinou, P.
單位
出版者
著錄名稱、卷期、頁數Thin Solid Films 610, p.42-47
摘要The X-ray absorption near edge structure (XANES), X-ray photoelectron spectroscopy (XPS), valence band photoemission (VB-PES) and Raman spectroscopy results show that the incorporation of nitrogen in pulsed laser deposited diamond like carbon (DLC) thin films, reverts the sp3 network to sp2 as evidenced by an increase of the sp2 cluster and ID/IG ratio in C K-edge XANES and Raman spectra respectively which reduces the hardness/Young's modulus into the film network. Si-doped DLC film deposited in a plasma enhanced chemical vapour deposition process reduces the sp2 cluster and ID/IG ratio that causes the decrease of hardness/Young's modulus of the film structure. The Fe-doped DLC films deposited by dip coating technique increase the hardness/Young's modulus with an increase of sp3-content in DLC film structure.
關鍵字Diamond like carbon (DLC);Fe-doped DLC;N-doped DLC;Si-doped DLC
語言英文
ISSN0040-6090
期刊性質國外
收錄於SCI;
產學合作國內;國外;
通訊作者
審稿制度
國別荷蘭
公開徵稿
出版型式,紙本
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