教師資料查詢 | 類別: 期刊論文 | 教師: 林清彬 LIN CHING-BIN (瀏覽個人網頁)

標題:Direct Patterning with Femtosecond Laser for Fabricating Ge2Sb2Te5 Stamps and Imprinting of UV Resins.
學年104
學期1
出版(發表)日期2015/11/26
作品名稱Direct Patterning with Femtosecond Laser for Fabricating Ge2Sb2Te5 Stamps and Imprinting of UV Resins.
作品名稱(其他語言)
著者C.B. Lin; Po-Yuan Cheng; Hung Yi Lino
單位
出版者
著錄名稱、卷期、頁數Journal of Material Sciences & Engineering 5(1), 100215(6pages)
摘要A novel method to fabricate a micro-scaled meter metallic stamp for imprinting is proposed in this study. Phase transformation film of amorphous Ge2Sb2Te5 (GST) was first deposited on cleaned silicon substrates by using DC sputtering process. The GST film is then irradiated with the femtosecond laser pulse directly through the photomask to photomelt and induces 2D-crystalline marks formed on the original amorphous region. Owing to the varied chemical properties between the amorphous region and crystalline marks, the crystalline marks were etched by using nitric acid mixed with ethanol. It is with this method that a micro-scaled meter metallic stamp was fabricated. Furthermore, the SU-8 polymeric patterns were successfully replicated and easily demolded from the etched GST stamp by using imprinting. Ultimately, with imprinting, the etched GST stamp could successfully replicate and also easily demold the SU-8 polymeric patterns.
關鍵字Phase transformation;Femtosecond Laser;Photomelting;Etching;Imprinting
語言英文(美國)
ISSN2169-0022
期刊性質國內
收錄於SCI;
產學合作
通訊作者C.B. Lin
審稿制度
國別中華民國
公開徵稿
出版型式,電子版
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