教師資料查詢 | 類別: 期刊論文 | 教師: 楊龍杰 Yang Lung-jieh (瀏覽個人網頁)

標題:Studies on Surface Tension Influenced Critical Gap in Cantilever Microstructures
學年103
學期2
出版(發表)日期2015/07/15
作品名稱Studies on Surface Tension Influenced Critical Gap in Cantilever Microstructures
作品名稱(其他語言)
著者楊龍杰; Marimuthu, Suseendar
單位淡江大學機械與機電工程學系
出版者Cambridge University Press
著錄名稱、卷期、頁數Journal of Mechanics, 32(1), pp.19-24
摘要This note presents an elasto-capillary model of a cantilever subject to capillary stiction during drying process of removing sacrificial layers in MEMS. Similar to the dynamic analysis of the electrostatic pull-in of electrostatic micro actuators, the cantilever beam tends to be pulled down to the substrate due to the nonlinear capillary force with respect to the gap. The critical one-half gap deformation and the corresponding critical wetting area for pulling down a micro cantilever by surface tension are analytically found herein. The instability situation of a generalized critical deformation for power-law surface force with respect to gap is also predicted accordingly. Some prior MEMS works are exemplified to justify this critical one-half gap deformation for capillary stiction.
關鍵字Stiction;Surface tension;Cantilever;Critical gap
語言英文
ISSN1727-7191
期刊性質國外
收錄於SCI;
產學合作
通訊作者楊龍杰
審稿制度
國別英國
公開徵稿
出版型式,電子版,紙本
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