教師資料查詢 | 類別: 會議論文 | 教師: 楊龍杰 Yang Lung-jieh (瀏覽個人網頁)

標題:A liquid-based gravity-driven etching-stop technique and its application to wafer level cantilever thickness control of AFM probes
學年93
學期1
發表日期2005/01/30
作品名稱A liquid-based gravity-driven etching-stop technique and its application to wafer level cantilever thickness control of AFM probes
作品名稱(其他語言)
著者Lin, Wei-chih; Liang, Chao-chiun; Tsai, Ching-hsiang; Hsieh, Gen-wen; 楊龍杰; Yang, Lung-jieh
作品所屬單位淡江大學機械與機電工程學系
出版者Piscataway: Institute of Electrical and Electronics Engineers (IEEE)
會議名稱Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
會議地點Miami Beach, FL, USA
摘要This paper mainly describes a liquid based gravity driven etching stop technique used for cantilever thickness control of atomic force microscope (AFM) probes on the wafer level. The technique makes use of the method of opposite etching trenches or the depth rulers. A pair of opposite trenches surrounds several AFM probes on both sides of the wafer to form probe chips. The trench depth on the cantilever front side is equal to the designed thickness of cantilevers. In the final step of the fabrication process for AFM probes, the wafer is etched by the KOH etchant to form the probe handles. The probe chips will be separated from the wafer simultaneously with the penetration of wafers at the trenches. The separated probes fall into the diiodomethane (CH2I2) solution beneath the KOH etchant and the wet etching stops automatically. The cantilever thickness of the AFM probes can then be wafer level controlled by the proposed etching stop technique.
關鍵字
語言英文
收錄於
會議性質國際
校內研討會地點
研討會時間20050130~20050203
通訊作者
國別美國
公開徵稿
出版型式
出處Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on, pp.500-503
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