教師資料查詢 | 類別: 期刊論文 | 教師: 楊龍杰 Yang Lung-jieh (瀏覽個人網頁)

標題:On Deriving Surface Tension Force in MEMS
學年103
學期1
出版(發表)日期2014/09/01
作品名稱On Deriving Surface Tension Force in MEMS
作品名稱(其他語言)
著者Yang, Lung-Jieh; Liu, Kuan-Chun; Lin, Wei-Chung
單位淡江大學機械與機電工程學系
出版者New Taipei City: Tamkang University
著錄名稱、卷期、頁數Journal of Applied Science and Engineering 17(3), p.223-230
摘要This paper presents the comparison between the force balance method and the surface energy method in deriving surface tension forces of some microelectromechanical systems (MEMS) problems. For studying the force balance of the capillary rise in the wick structure of heat pipes or heat spreaders, not only the surface tension at the three-phase interfaces but also the free surfaces should be carefully considered. Meanwhile the intrinsic scalar quantity of surface energy method proves its systematic feature without too much physical insight into the surface tension issues. Finally the authors used the surface energy method to study the capillary stiction of a cantilever beam during its drying process. A surface tension-driven cantilever array using for flapping micro-air-vehicles (FMAVs) is exemplified to justify the theoretical prediction in a static manner.
關鍵字Surface Tension;Free Surface;Cantilever;Stiction
語言英文(美國)
ISSN1560-6686
期刊性質國外
收錄於EI;ESCI;
產學合作
通訊作者楊龍杰
審稿制度
國別中華民國
公開徵稿
出版型式,紙本
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