| A novel self-aligned fabrication process for nickel-indiffused lithium niobate ridge optical waveguides | |
|---|---|
| 學年 | 87 |
| 學期 | 2 |
| 出版（發表）日期 | 1999-04-01 |
| 作品名稱 | A novel self-aligned fabrication process for nickel-indiffused lithium niobate ridge optical waveguides |
| 作品名稱（其他語言） | |
| 著者 | Chang, Wen-ching; Sue, Chao-yung; Hou, Hung-ching; Chang, Shih-jung; Wei, Pei-kuen |
| 單位 | 淡江大學電機工程學系 |
| 出版者 | Piscataway: Institute of Electrical and Electronics Engineers (IEEE) |
| 著錄名稱、卷期、頁數 | IEEE journal of lightwave technology 17(4), pp.613-620 |
| 摘要 | A novel self-aligned fabrication process for Ni : LiNbO3 ridge waveguides has been proposed. By using the self-aligned trilayered structure composed of Ni/Ti/Si, the fabrication process is significantly simplified, and takes advantage of suppression of the unwanted planar waveguides and high-coupling efficiency to a single-mode fiber as compared to the conventional processes. Detailed investigations into the characteristics of the ridge waveguides have also proved to be informative under different fabrication parameters. Moreover, the novel self-aligned fabrication process was applied to fabricate a ridge waveguide Mach-Zehnder modulator. The measured half-wave voltage and extinction ratio were 20.5 V and 12 dB (@ 1.3 \mum), and were 4.2 V and 8 dB (@0.6328gm). |
| 關鍵字 | |
| 語言 | en |
| ISSN | 0733-8724 1558-2213 |
| 期刊性質 | 國外 |
| 收錄於 | |
| 產學合作 | |
| 通訊作者 | |
| 審稿制度 | |
| 國別 | USA |
| 公開徵稿 | |
| 出版型式 | 紙本 電子版 |
| 相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/46230 ) |
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