教師資料查詢 | 類別: 期刊論文 | 教師: 林諭男 I-nan Lin (瀏覽個人網頁)

標題:Change of diamond film structure and morphology with N2 addition in MW PECVD apparatus with linear antenna delivery system
學年103
學期1
出版(發表)日期2014/10/01
作品名稱Change of diamond film structure and morphology with N2 addition in MW PECVD apparatus with linear antenna delivery system
作品名稱(其他語言)
著者Marie Jakl Kre_cmarová; Václav Petrák; Andrew Taylor; Kamatchi Jothiramalingam Sankaran; Lin, I-Nan; Aleš Jäger; Viera Gärtnerová; Ladislav Fekete; Jan Drahokoupil; František Laufek; Ji_rí Vacík; Pavel Hubík; Vincent Mortet; Miloš Nesládek
單位淡江大學物理學系
出版者Weinheim: Wiley - V C H Verlag GmbH &; Co. KGaA
著錄名稱、卷期、頁數physica status solidi (a) 211(10), pp.2296–2301
摘要Deposition of nano-crystalline diamond (NCD) over large areas is of high interest for industrial applications. For instance NCD is an excellent substrate for cell growth but it is also interesting for photonic applications associated with nitrogen-vacancy (NV) centres. There have been many studies on the effect of nitrogen addition on the growth of diamond using conventional resonance cavity microwave plasmas (both H and Ar based) but none using MW PECVD apparatus with linear antenna delivery system (MW-LA-PECVD). In this work, we show that an ultra nano-crystalline diamond (UNCD) type of morphology can be prepared upon N2 addition to H2[BOND]CO2[BOND]CH4 plasmas at low pressures (0.3 mbar) and low temperature (520 °C); however, these films despite their UNCD character show sp3 dominated Raman spectra and highly isolating behavior. The crystalline structure and morphology of the films were characterized by scanning electron microscopy, atomic force microscopy, Raman spectroscopy, grazing angle X-ray diffraction, and transmission electron microscopy. Diamond films' composition was evaluated from thermal neutron depth profiling. Films were also characterized by photoluminescence spectroscopy to study the incorporation of luminescent NV centre. Addition of nitrogen increases deposition rate and dramatically changes surface morphology and crystalline structure from well faceted diamond crystals to UNCD like morphology.
關鍵字linear antenna;nano-diamond;nitrogen doping;TEM;Raman spectroscopy
語言英文
ISSN1862-6319
期刊性質國外
收錄於
產學合作
通訊作者
審稿制度
國別德國
公開徵稿
出版型式電子版
相關連結
Google+ 推薦功能,讓全世界都能看到您的推薦!