教師資料查詢 | 類別: 期刊論文 | 教師: 許世杰 Hsu, Shih-chieh (瀏覽個人網頁)

標題:Fabrication and tolerance reduction of a Si-based pickup module for optical storage
學年94
學期2
出版(發表)日期2006/07/01
作品名稱Fabrication and tolerance reduction of a Si-based pickup module for optical storage
作品名稱(其他語言)
著者Lee, Chien-chien; Wang, Chin-ming; Huang, S.K.; Chang, J. Y.;Chi, Gou-chung; Hsu, S. C.; Liu, C. Y.
單位淡江大學化學工程與材料工程學系
出版者Society of Photo-optical Instrumentation Engineers
著錄名稱、卷期、頁數Optical Engineering 45(7), 074601
摘要We develop a miniaturized optical signal pickup module, with a working wavelength of 650 nm, and an image numerical aperture (NA) of 0.6, comprised of several SiNX optical phase elements on stacked Si substrates, for use in optical storage systems. The optical module, which is optical-on-axis and transmissible in both visible and infrared ranges, is designed to include not only a light source, but also diffractive optical elements (DOEs), which can be made with micro-optoelectromechanical systems (MOEMS) technology. Its optical operation is simulated by ray tracing to optimize the spot size ( ∼ 0.6 μm) focused on the disk by adjusting the tolerance of each element in the alignment. All the Si-based transmission optical elements are fabricated and stacked by self-alignment bonding to reduce the tolerance of the assembled system. We obtain a circular focused spot when the full-width at half maximum (FWHM) of the zero-order beam is 3.1 μm; the diffraction limited spot size on the optical disk is 0.7 μm.
關鍵字Diffraction;Fabrication;Optical components;Optical storage;Holographic optical elements;Objectives;Microopto electromechanical systems
語言英文
ISSN0091-3286
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產學合作
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審稿制度
國別中華民國
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