教師資料查詢 | 類別: 期刊論文 | 教師: 賴偉淇 Lai,Wei-chi (瀏覽個人網頁)

標題:Preparation and properties of Nano-silica Modified Negative Acrylate Photoresist
學年97
學期1
出版(發表)日期2008/10/01
作品名稱Preparation and properties of Nano-silica Modified Negative Acrylate Photoresist
作品名稱(其他語言)
著者Lee, Chih-kang; Don, Trong-ming; Lai, Wei-chi; Chen, Chin-chung; Lin, Dar-jong; Cheng, Liao-ping
單位淡江大學化學工程與材料工程學系
出版者Lausanne: Elsevier S.A.
著錄名稱、卷期、頁數Thin Solid Films 516(23), pp. 8399-8407
摘要A series of silica modified photoresists had been successfully developed through incorporation of a particular nanoparticles suspension. Free radical polymerization was employed to synthesize the binder, an acrylate copolymer resin of benzyl methacrylate, methacrylic acid and 2-hydroxyethyl methacrylate, of the photoresist. The acid value, viscosity, molecular weight and thermal properties of the formed binders were measured. Then, surface-modified silica particles prepared by the sol–gel method were introduced to the photoresist. Because the modified silica particles contained considerable amount of reactive double bonds (CC) on their surfaces, they would react with the polyfunctional monomers in the photoresist to form an organic–inorganic nanohybrid. Fourier transform infrared spectrometer was used to analyze the evolution of chemical bonds at various stages of the preparation process. Thermal analyses including thermal gravimetric analyzer, differential scanning calorimeter and thermo-mechanical analyzer were used to evaluate the level of enhancement on thermal and dimensional stabilities of the photoresist due to silica incorporation.
關鍵字Photoresist; Binder; Sol–gel method; Organic–inorganic nanohybrid
語言英文
ISSN0040-6090
期刊性質國外
收錄於SCI;EI
產學合作
通訊作者
審稿制度
國別瑞士
公開徵稿
出版型式紙本
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