A method using V-grooves to monitor the thickness of silicon membrane with m resolution
學年 87
學期 1
出版（發表）日期 1998-09-01
作品名稱 A method using V-grooves to monitor the thickness of silicon membrane with m resolution
作品名稱（其他語言）
著者 Chang, Pei-zen; 楊龍杰; Yang, Lung-jieh
單位 淡江大學機械與機電工程學系
出版者 Institute of Physics (IOP)
著錄名稱、卷期、頁數 Journal of micromechanics and microengineering 8(3), pp.182-187
摘要 This article presents a method capable of easily identifying the membrane thickness of micro-sensors by a V-groove depth ruler that has been made in advance on silicon wafers before sensor fabrication. The proposed method not only provides a viable alternative to other etch-stop techniques, but can also be used as an in situ tool for depth or thickness monitoring with micrometer resolution. Without p+ diffusion or an n-epitaxial layer on silicon substrates, the batch processing capability of silicon piezoresisitve micro-sensors can be preserved with V-grooves. Furthermore, the method proposed herein could also calibrate the etching rate of anisotropic etching solutions, check the uniformity of pressure sensors and offer guidelines on how to further improve the batch process of silicon bulk micro-machining. Moreover, a revised shape of V-groove depth ruler with self-alignment capability is also proposed herein.
關鍵字
語言 en
ISSN 0960-1317
期刊性質 國外
收錄於
產學合作
通訊作者
審稿制度 否
國別 GBR
公開徵稿
出版型式 ,紙本
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