| Fabrication and test of radial grooved micro heat pipes | |
|---|---|
| 學年 | 91 |
| 學期 | 1 |
| 出版（發表）日期 | 2002-10-01 |
| 作品名稱 | Fabrication and test of radial grooved micro heat pipes |
| 作品名稱（其他語言） | |
| 著者 | 康尚文; Kang , Shung-wen; Tsai, Sheng-hong; Chen, Hong-chih |
| 單位 | 淡江大學機械與機電工程學系 |
| 出版者 | Elsevier |
| 著錄名稱、卷期、頁數 | Applied thermal engineering 22(14), pp.1559-1568 |
| 摘要 | This paper describes the development of radial grooved micro heat pipes (MHPs) with a three-layer structure. The MHPs were designed to allow separation of the liquid and vapor flow to reduce the viscous shear force. The 5×5 cm2 MHP array was fabricated by using bulk micromachining and eutectic bonding techniques on 4-in. (1 0 0) silicon wafers. Experiments were undertaken to evaluate the performance of wafers with three different wafer fill rates at different input powers. We glued a heater below the evaporator section, pumped cold water through a square copper heat exchanger above the heat pipe, and pasted 15 K-type thermocouples on both sides of MHP structure to record the variations of surface temperature. After the evaluation, the MHP with 70% fill rate showed the best performance as compared to samples with smaller fill rates. |
| 關鍵字 | Micro heat pipe;Bulk micromachining;Eutectic bonding |
| 語言 | en |
| ISSN | 1359-4311 |
| 期刊性質 | 國內 |
| 收錄於 | |
| 產學合作 | |
| 通訊作者 | |
| 審稿制度 | 否 |
| 國別 | TWN |
| 公開徵稿 | |
| 出版型式 | ,電子版 |
| 相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/45665 ) |
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