教師資料查詢 | 類別: 期刊論文 | 教師: 林諭男 I-nan Lin (瀏覽個人網頁)

標題:Investigations on Diamond Nanostructuring of Different Morphologies by the Reactive-Ion Etching Process and Their Potential Applications
學年102
學期1
出版(發表)日期2013/08/01
作品名稱Investigations on Diamond Nanostructuring of Different Morphologies by the Reactive-Ion Etching Process and Their Potential Applications
作品名稱(其他語言)
著者Srinivasu Kunuku; Kamatchi Jothiramalingam Sankaran; Cheng-Yen Tsai;Wen-Hao Chang; Nyan-Hwa Tai; Keh-Chyang Leou; Lin, I-Nan
單位淡江大學物理學系
出版者Washington, DC: American Chemical Society
著錄名稱、卷期、頁數ACS Applied Materials and Interfaces 5(15), pp.7439-7449
摘要We report the systematic studies on the fabrication of aligned, uniform, and highly dense diamond nanostructures from diamond films of various granular structures. Self-assembled Au nanodots are used as a mask in the self-biased reactive-ion etching (RIE) process, using an O2/CF4 process plasma. The morphology of diamond nanostructures is a close function of the initial phase composition of diamond. Cone-shaped and tip-shaped diamond nanostructures result for microcrystalline diamond (MCD) and nanocrystalline diamond (NCD) films, whereas pillarlike and grasslike diamond nanostructures are obtained for Ar-plasma-based and N2-plasma-based ultrananocrystalline diamond (UNCD) films, respectively. While the nitrogen-incorporated UNCD (N-UNCD) nanograss shows the most-superior electron-field-emission properties, the NCD nanotips exhibit the best photoluminescence properties, viz, different applications need different morphology of diamond nanostructures to optimize the respective characteristics. The optimum diamond nanostructure can be achieved by proper choice of granular structure of the initial diamond film. The etching mechanism is explained by in situ observation of optical emission spectrum of RIE plasma. The preferential etching of sp2-bonded carbon contained in the diamond films is the prime factor, which forms the unique diamond nanostructures from each type of diamond films. However, the excited oxygen atoms (O*) are the main etching species of diamond film.
關鍵字diamond nanostructures; reactive ion etching; Au nanodots; ion bombardment; electron field emission; photoluminescence
語言英文
ISSN1944-8244
期刊性質國外
收錄於SCI
產學合作
通訊作者Lin, I-Nan
審稿制度
國別美國
公開徵稿
出版型式紙本;電子版
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