教師資料查詢 | 類別: 會議論文 | 教師: 楊龍杰 Yang Lung-jieh (瀏覽個人網頁)

標題:A Gas-Leakage Sensor for PDMS Chip Frames
學年96
學期2
發表日期2008/06/22
作品名稱A Gas-Leakage Sensor for PDMS Chip Frames
作品名稱(其他語言)
著者Yang, Meng-Chiao; Yang, Lung-Jieh; Wang, Hsin-Hsiung
作品所屬單位淡江大學機械與機電工程學系
出版者
會議名稱The 4th Asia Pacific Conference on Transducers and MicroNano Technologies(APCOT 2008)
會議地點臺南, 臺灣
摘要This paper proposes a new methodology to detect the gas-leakage and the corresponding diffusion coefficient of PDMS. We use PDMS instead of Pyrex 7740 glass to seal the backside V-groove of pressure sensor chips. We put the sensor into a pressure testing machine and pressurize with CO2 at 300 psi. By observing output voltage, the time of CO2 permeated into cavity of the sensor was easily to find. In this paper, we use two PDMS membrane with different thickness, 45.mu.m and 500.mu.m, to package the sensors and explore the gas-leakage of PDMS membrane. The mathematical model for the leaking process shows that the diffusion coefficients D are 7.49*10/sup -10/m2 /sec for 45.mu.m thick PDMS and 1.38*10/sup -9/m2 /sec for 500.mu.m thick PDMS, respectively.
關鍵字PDMS;Gas-leakage;Diffusion coefficient
語言英文
收錄於
會議性質國際
校內研討會地點
研討會時間20080622~20080625
通訊作者
國別中華民國
公開徵稿Y
出版型式紙本
出處Proceedings of the 4th Asia Pacific Conference on Transducers and Micro-Nano Technologies (APCOT 2008),4p.
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