教師資料查詢 | 類別: 期刊論文 | 教師: 趙崇禮 CHAO CHOUNG-LII (瀏覽個人網頁)

標題:Fabricating microstructures on CVD diamond film
學年100
學期1
出版(發表)日期2012/01/01
作品名稱Fabricating microstructures on CVD diamond film
作品名稱(其他語言)
著者Chao, Choung-Lii; Chou, Wen-Chen; Lin, Wen-Chung; Su, Wei-Jhe; Ma, Kung-Jeng
單位淡江大學機械與機電工程學系
出版者Olney: Inderscience Publishers
著錄名稱、卷期、頁數International Journal of Surface Science and Engineering 6(1/2), pp.59-70
摘要Diamond has many advanced properties which may provide potential solutions to various engineering problems. This study focuses on fabricating micro-structures on CVD diamond film. A thin layer of Au or Pt together with thermal annealing process is used to form micro–masks and reactive ion etching (RIE) method was subsequently adopted in this research to etch and fabricate micro–structures. Field emission scanning electron microscope (FESEM) and micro Raman spectroscopy were used to observe and analyse the morphology and composition of the obtained microstructures. Results show that different coated materials and thickness can produce different types of micro–masks and, as a consequence, different microstructures. Depending on the micro–mask, whisker–like or pillar–like microstructures are successfully produced and, based on the micro Raman spectrum; these microstructures still retains good diamond quality.
關鍵字CVD diamond film; thermal annealing; reactive ion etching; RIE; microstructure
語言英文
ISSN1749-785X; 1749-7868
期刊性質國外
收錄於SCI
產學合作
通訊作者Chao, Choung–Lii
審稿制度
國別英國
公開徵稿
出版型式紙本
相關連結
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