教師資料查詢 | 類別: 期刊論文 | 教師: 楊龍杰 Yang Lung-jieh (瀏覽個人網頁)

標題:Phase synchronization of micro-mirror arrays using elastic linkages
學年90
學期1
出版(發表)日期2001/12/01
作品名稱Phase synchronization of micro-mirror arrays using elastic linkages
作品名稱(其他語言)
著者Yang, Lung-Jieh; Liu, Chih-Wei; Chang, Peizen
單位淡江大學機械與機電工程學系
出版者Lausanne: Elsevier S.A.
著錄名稱、卷期、頁數Sensors and Actuators, A: Physical 95(1), pp.55-60
摘要This paper investigates phase synchronization and concordant resonance of micro-mirror arrays and describes in detail a proposed design for a segmented micro-mirror with elastic linkages. The device replaces a conventional large area mirror, thus increasing the working frequency and allowing micro-mirror arrays to induce smaller vibration amplitude. The torsional micro-mirror array is fabricated using three conventional masks based on silicon bulk-micromachining technology. Experimental results of the prototype sample show that the phase difference among the mirror segments of the mirror array is below 1/15 cycle.
關鍵字Elasticity;Microelectromechanical devices;Micromachining;Resonance;Synchronization;Vibrations (mechanical);Bulk-micromachining;Elastic linkages;Micro-mirror arrays;Phase synchronization;Mirrors
語言英文
ISSN0924-4247
期刊性質國外
收錄於SCI;EI
產學合作
通訊作者Yang, Lung-Jieh
審稿制度
國別史瓦濟蘭
公開徵稿
出版型式紙本
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