教師資料查詢 | 類別: 期刊論文 | 教師: 楊龍杰 Yang Lung-jieh (瀏覽個人網頁)

標題:Photo-patternable gelatin as protection layers in low-temperature surface micromachinings
學年91
學期1
出版(發表)日期2003/01/01
作品名稱Photo-patternable gelatin as protection layers in low-temperature surface micromachinings
作品名稱(其他語言)
著者Yang, Lung-Jieh; Lin, W. Z.; Yao, T. J.; Tai, Y. C.
單位淡江大學機械與機電工程學系
出版者Lausanne: Elsevier S.A.
著錄名稱、卷期、頁數Sensors and Actuators, A: Physical 103(1-2), pp.284-290
摘要This paper describes a newly developed low temperature photo-patternable gelatin technology that is useful to produce a thick (>10 μm) gelatin protecting and strengthening layer for weak MEMS microstructures. Example demonstrated here is the gelatin process integrated with the parylene MEMS technology. The complete processing details and formulae are reported and allow anyone to use gelatin like photo-resist. We find that it is a chemical-resistant and mechanical-robust material for MEMS applications.
關鍵字Chemical resistance;Low temperature operations;Microelectromechanical devices;Microstructure;Photoresists;Protective coatings;Stiction;Thick films;Gelatin;Micromachining
語言英文
ISSN0924-4247
期刊性質國外
收錄於
產學合作
通訊作者Yang, Lung-Jieh
審稿制度
國別史瓦濟蘭
公開徵稿
出版型式紙本
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