教師資料查詢 | 類別: 期刊論文 | 教師: 楊龍杰 Yang Lung-jieh (瀏覽個人網頁)

標題:The micro ion drag pump using indium-tin-oxide (ITO) electrodes to resist aging
學年92
學期2
出版(發表)日期2004/03/01
作品名稱The micro ion drag pump using indium-tin-oxide (ITO) electrodes to resist aging
作品名稱(其他語言)
著者Yang, Lung-Jieh; Wang, Jiun-Min; Huang, Yu-Lin
單位淡江大學機械與機電工程學系
出版者Lausanne: Elsevier S.A.
著錄名稱、卷期、頁數Sensors and Actuators A: Physical 111(1), pp.118-122
摘要This paper describes a micro ion drag pump, or an ejection type electro-hydrodynamic (EHD) micropump, using indium-tin-oxide (ITO) planar electrodes to deal with the aging problem in a novel way. The ITO film for the electrodes, which are immersing in the working liquid, prolongs the operation duration of the valveless micropump. It also makes anodic bonding easily and feasible in packaging the glass substrate (with ITO) hermetically with the silicon microchannels. Therefore, the scaling down or the miniaturization of ion drag pumps can be achieved herein. The ITO electrodes could drive the ethyl alcohol to have the maximum volumetric flow rate of 356 nl/min by applying a dc voltage of 61 V. More efforts and improvements on the pumping efficiency as well as the long-term stability of the ITO electrodes are acquired correspondingly.
關鍵字Aging of materials;Cooling;Electrodes;Electrohydrodynamics;Ethanol;Flow of fluids;Glass;Indium compounds;Liquid crystal displays;Silicon;Volumetric analysis;Electro-hydrodynamic (EHD) micropump;Indium-tin-oxide;Ion drag pump;Pumps
語言英文
ISSN0924-4247
期刊性質國外
收錄於SCI;EI
產學合作
通訊作者Yang, Lung-Jieh
審稿制度
國別史瓦濟蘭
公開徵稿
出版型式紙本
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