| A wide‐g range silicon piezoresistive accelerometer | |
|---|---|
| 學年 | 84 |
| 學期 | 1 |
| 出版（發表）日期 | 1995-12-01 |
| 作品名稱 | A wide‐g range silicon piezoresistive accelerometer |
| 作品名稱（其他語言） | 具寬g範圍的矽壓阻式加速度計 |
| 著者 | 許郁文; 呂學士; 楊龍杰; 張培仁; Hsu, Yu‐Wen; Lu, Shey‐Shi; Yang, Lung‐Jieh; Chang, Pei‐Zen |
| 單位 | 淡江大學機械與機電工程學系 |
| 出版者 | Taipei : Chinese Institute of Chemical Engineers |
| 著錄名稱、卷期、頁數 | Journal of the Chinese Institute of Engineers=中國工程學刊 18(6), pp.873-878 |
| 摘要 | In this paper, a high‐performance silicon piezoresistive accelerometer, fabricated by bulk micromachining with an almost linear I/O (acceleration / voltage) relationship from 0 to 90g over a 400Hz bandwidth suitable for vehicle's safety system, is described. This accelerometer is composed of two glass cover caps and a Si sensing structure. The size of the sensing structure is 3.3mm × 2.05 mm × 0.15 mm. It consisted of a “mass”, a “frame”, and 4 thin beam “bridges”. The sensitivity of the accelerometer was found to be 9.6 × 10‐8 (sec2/m) and a gauge factor of 18 was deduced from this value. |
| 關鍵字 | piezoresistivity;accelerometer |
| 語言 | en |
| ISSN | 0253-3839 |
| 期刊性質 | 國內 |
| 收錄於 | |
| 產學合作 | |
| 通訊作者 | |
| 審稿制度 | |
| 國別 | TWN |
| 公開徵稿 | |
| 出版型式 | 紙本 |
| 相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/65272 ) |
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