The Application of V-Groove Solt-Array Method to the Piezoresistive Pressure Sensors
學年 85
學期 2
出版（發表）日期 1997-03-01
作品名稱 The Application of V-Groove Solt-Array Method to the Piezoresistive Pressure Sensors
作品名稱（其他語言） 應用V型槽深度尺於壓阻式壓力計之製作
著者 楊龍杰; Yang, Lung-jieh; 江振家; Jian, C. C.; 張培仁; Chang, P. Z. ;
單位 淡江大學機械與機電工程學系
出版者 Taipei : Chinese Institute of Chemical Engineers
著錄名稱、卷期、頁數 Journal of the Chinese Institute of Engineers=中國工程學刊 20(3), pp.335-347
摘要 This paper describes a simple method to identify the membrane thickness of the piezoresistive pressure sensor by the so-called “slotarray” which has been made in advance on the wafers before sensor fabrication. Such a method can be applied as a substitute for other etch-stop techniques with micrometer-resolution. The results can also be used to check the uniformity of pressure sensors and give a guideline for further improvements in the batch process of silicon bulk micromachining. A series of pressure sensors with a chip size of 3×3×0.2mm3 were presented as the examples of the V-groove slot-array method. The finite element method (FEM) software ANSYS was accessed to predict the stress and resistance change of the sensors. The new pressure sensors with stiffened-bosses are tested and had a best sensitivity of 9.0 mV/atm/V and a non-linearity less than 1%.
關鍵字 piezoresistive;pressure sensor;V-groove
語言 en
ISSN 0253-3839
期刊性質 國內
收錄於
產學合作
通訊作者
審稿制度
國別 TWN
公開徵稿
出版型式 紙本
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