教師資料查詢 | 類別: 期刊論文 | 教師: 楊龍杰 Yang Lung-jieh (瀏覽個人網頁)

標題:The Zeroth Order Solution of the Velocity Field around Micro Comb Structures with Lateral Oscillation
學年90
學期1
出版(發表)日期2002/01/01
作品名稱The Zeroth Order Solution of the Velocity Field around Micro Comb Structures with Lateral Oscillation
作品名稱(其他語言)半導體微型加速度計梳狀結構之流場阻尼分析
著者李其源; Lee, Chi-yuan; 楊龍杰; Yang, Lung-jieh; 陳炳煇; Chen, Ping-hei
單位淡江大學機械與機電工程學系
出版者Taipei : Chinese Institute of Chemical Engineers
著錄名稱、卷期、頁數Journal of the Chinese Institute of Engineers=中國工程學刊 25(1), pp.57-65
摘要This work models the flow around the comb structure of a surface‐ machined microaccelerometer as a two‐dimensional, time‐periodic, incompressible flow with periodic boundary conditions. The corresponding two‐dimensional Navier‐Stokes equation generally has no analytical solution. However, using small‐size scaling, the dominant diffusion mechanism of the micro flow pattern simplifies the governing equations into one set of diffusion equations. Moreover, this investigation presents an analytical approximation combined with the method of separating variables in a complex‐variable domain, to solve the two‐dimensional diffusion equation of the velocity field. The precise analysis of air damping herein could predict the frequency response of the micro comb structures dynamic behavior.
關鍵字阻尼比;微梳狀結構;微機電系統 Damping ratio;Micro comb structure;Micro-electro-mechanical systems;MEMS
語言英文
ISSN0253-3839
期刊性質國內
收錄於
產學合作
通訊作者
審稿制度
國別中華民國
公開徵稿
出版型式紙本
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