標題:X-ray absorption spectroscopy (XAS) study of dip deposited a-C:H(OH) thin films |
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學年 | 93 |
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學期 | 1 |
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出版(發表)日期 | 2004/08/01 |
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作品名稱 | X-ray absorption spectroscopy (XAS) study of dip deposited a-C:H(OH) thin films |
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作品名稱(其他語言) | |
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著者 | Ray, S.C.; Tsai, H.M.; Chiou, J.W.; Bose, B.; Jan, J.C.; Kumar, Krishna; Pong, W.F.; Dasgupta D.; Tsai, M. H. |
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單位 | 淡江大學物理學系 |
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出版者 | Temple Way: Institute of Physics (IOP) |
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著錄名稱、卷期、頁數 | Journal of Physics Condensed Matter 16(32), pp.5713-5719 |
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摘要 | This work measures the C and O K-edge x-ray absorption near-edge structure (XANES) spectra of hydrogenated amorphous carbon (a-C:H) films deposited at various baking temperatures Tb (Tb = 300–500 °C at 50 °C). The C–H σ* peak related to the content of the sp2 graphite-like bonding in the C K-edge spectra was found to yield to the C–H π* peak related to the sp3 diamond-like bonding at high temperature (500 °C). We find that the intensities of both the sp2 and sp3 features in the C K-edge XANES spectra decrease with increase of Tb, which suggests an increase of the defect concentration with Tb. The intensities of the O K-edge XANES spectra are found to decrease with increase of Tb, which suggests thermally induced decomposition of carbonyl contaminants on the surface. The elemental analysis C/O (or O/C) ratio was obtained from XPS spectra and indicates that films are not hydrogenated amorphous carbon but rather oxyhydrogenated amorphous carbon thin films. |
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關鍵字 | Absorption spectroscopy; Carbon; Decomposition; Friction; High temperature effects; Hydrogenation; X ray photoelectron spectroscopy; X ray spectroscopy; Carbon phases; X-ray absorption near-edge structures (XANES); X-ray absorption spectroscopy (XAS); Thi |
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語言 | 英文 |
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ISSN | 0953-8984 |
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期刊性質 | 國外 |
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收錄於 | |
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產學合作 | |
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通訊作者 | Ray, S.C. |
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審稿制度 | |
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國別 | 英國 |
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公開徵稿 | |
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出版型式 | 紙本 |
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