教師資料查詢 | 類別: 會議論文 | 教師: 趙崇禮 CHAO CHOUNG-LII (瀏覽個人網頁)

標題:A Research on Quick Polishing of CVD Diamond Film
學年95
學期1
發表日期2006/11/24
作品名稱A Research on Quick Polishing of CVD Diamond Film
作品名稱(其他語言)
著者趙崇禮; 周文成; 林夏蓁; 簡川于
作品所屬單位淡江大學機械與機電工程學系
出版者中國材料科學學會
會議名稱2006年中國材料科學學會年會
會議地點臺南市, 臺灣
摘要Polycrystalline CVD diamond film possesses many outstanding physical and mechanical properties which make it a very important engineering material. However, high hardness value and extreme brittleness have made CVD diamond a very difficult material to be machined by conventional grinding and polishing process. In this present study, the diamond wafer was pre-treated with RIE before it was thermo-chemically polished. It was found when diamond wafer was ion-etched in O2 (25 min, 200W, 50sccm), the top layer pyramidal diamond crystals were anisotropically etched into micro-pillar structures. These micro-pillars have significantly weakened the structure of diamond grains and paved the way for subsequent thermo-chemical polishing. Based on the obtained results, this method has great potential to be applied to speed up the polishing process of CVD diamond films in the future.
關鍵字Reactive ion etching;Thermo-chemical polishing;CVD diamond film
語言英文
收錄於
會議性質國內
校內研討會地點
研討會時間20061124~20061125
通訊作者
國別中華民國
公開徵稿Y
出版型式紙本
出處2006年中國材料科學學會年會論文集, 4p.
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