教師資料查詢 | 類別: 期刊論文 | 教師: 簡素芳 CHIEN, SU-FENG (瀏覽個人網頁)

標題:Effect of Nano-Ni Catalyst on the Growth and Characterization of Diamond Films by HFCVD
學年98
學期2
出版(發表)日期2010/05/01
作品名稱Effect of Nano-Ni Catalyst on the Growth and Characterization of Diamond Films by HFCVD
作品名稱(其他語言)
著者Teng, Chien-chung; Ku, Feng-chi; Sung, Chien-min; Deng, Jin-pei; Chien, Su-fang; Song, Shin-min; Lin, Chhiu-tsu
單位淡江大學化學學系
出版者New York: Hindawi Publishing Corporation
著錄名稱、卷期、頁數Journal of Nanomaterials 2010, 365614(8pages)
摘要Four different catalysts, nanodiamond seed, nano-Ni, diamond powder, and mixture of nano-Ni/diamond powder, were used to activate Si wafers for diamond film growth by hot-filament CVD (HFCVD). Diamond crystals were shown to grow directly on both large diamond powder and small nanodiamond seed, but a better crystallinity of diamond film was observed on the ultrasonicated nanodiamond seeded Si substrate. On the other hand, nano-Ni nanocatalysts seem to promote the formation of amorphous carbon but suppress transpolyacetylene (t-PA) phases at the initial growth of diamond films. The subsequent nucleation and growth of diamond crystals on the amorphous carbon layer leads to generation of the spherical diamond particles and clusters prior to coalescence into continuous diamond films based on the CH3 addition mechanism as characterized by XRD, Raman, ATR/FT-IR, XPS, TEM, SEM, and AFM techniques. Moreover, a 36% reduction in surface roughness of diamond film assisted by nano-Ni catalyst is quite significant.
關鍵字
語言英文
ISSN1687-4110
期刊性質國外
收錄於SCI
產學合作
通訊作者Lin, Chhiu-tsu
審稿制度
國別美國
公開徵稿
出版型式紙本
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