Microfabrication Process for Making Microstructures as Geometrically Mimiaturized from Three-Dimensional Orientations
學年 89
學期 2
專利開始日期 2001-04-01
專利結束日期 2001-04-01
作品名稱 Microfabrication Process for Making Microstructures as Geometrically Mimiaturized from Three-Dimensional Orientations
作品名稱（其他語言）
著者 Lin, Ching-bin; 康尚文; Kang, Shung-wen; Wei, Mau-kuo
單位 淡江大學機械與機電工程學系
著錄名稱、卷期、頁數
描述 國際分類號：C25D 1/00; C25D 1/20; C25D 001/00 United States Patent: 6,221,227 Application number: 09/454,066 專利國別：美國
摘要 A microfabrication process comprises the swelling of at least a hydrophilic polymer in order for shrinking each cavity size of a micromachined microstructure pattern from three-dimensional orientations, whereby upon filling or deposition of metal into each cavity of the pattern when performing an electroforming step, a supermini microstructure with slim, fine, thin and small size can be obtained as geometrically miniaturized from three-dimensional orientations.
關鍵字
語言 en
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