教師資料查詢 | 類別: 期刊論文 | 教師: 楊龍杰 Yang Lung-jieh (瀏覽個人網頁)

標題:A PDMS-based thermo-pneumatic micropump with Parylene inner walls
學年100
學期1
出版(發表)日期2011/08/01
作品名稱A PDMS-based thermo-pneumatic micropump with Parylene inner walls
作品名稱(其他語言)
著者Yang, Lung-Jieh; Lin, Tzu-Yuan
單位淡江大學機械與機電工程學系
出版者Amsterdam: Elsevier BV
著錄名稱、卷期、頁數Microelectronic Engineering 88(8), pp.1894-1897
摘要This study demonstrated a new thermo-pneumatic micropump implemented by stacking three layers of PDMS on a glass slide. The pumping with valve-less diffuser/nozzle channel is driven due to the flow rectification effect. The large actuation stroke of the deforming diaphragm appears as the phase change from the working liquid into vapor inside the evaporation chamber by the Joule heating of the embedded heaters. With the wall temperature of PDMS below 50 C verified by an infrared imager, the pumping flow rates are 3.5–12.5 nL/min subject to a square wave of 4 V peak-to-peak heating voltage with frequency varied from 0.3 to 3.0 Hz. After coating the micropump inner wall with a 3 lm Parylene against the gas leakage through PDMS, the micropump paid the price of decreasing the flow rate down to 2.5–6.5 nL/min.
關鍵字
語言英文
ISSN0167-9317
期刊性質國外
收錄於SCI;EI;
產學合作
通訊作者Yang, Lung-Jieh
審稿制度
國別荷蘭
公開徵稿
出版型式,紙本
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