| A PDMS-based thermo-pneumatic micropump with Parylene inner walls | |
|---|---|
| 學年 | 100 |
| 學期 | 1 |
| 出版（發表）日期 | 2011-08-01 |
| 作品名稱 | A PDMS-based thermo-pneumatic micropump with Parylene inner walls |
| 作品名稱（其他語言） | |
| 著者 | Yang, Lung-Jieh; Lin, Tzu-Yuan |
| 單位 | 淡江大學機械與機電工程學系 |
| 出版者 | Amsterdam: Elsevier BV |
| 著錄名稱、卷期、頁數 | Microelectronic Engineering 88(8), pp.1894-1897 |
| 摘要 | This study demonstrated a new thermo-pneumatic micropump implemented by stacking three layers of PDMS on a glass slide. The pumping with valve-less diffuser/nozzle channel is driven due to the flow rectification effect. The large actuation stroke of the deforming diaphragm appears as the phase change from the working liquid into vapor inside the evaporation chamber by the Joule heating of the embedded heaters. With the wall temperature of PDMS below 50 C verified by an infrared imager, the pumping flow rates are 3.5–12.5 nL/min subject to a square wave of 4 V peak-to-peak heating voltage with frequency varied from 0.3 to 3.0 Hz. After coating the micropump inner wall with a 3 lm Parylene against the gas leakage through PDMS, the micropump paid the price of decreasing the flow rate down to 2.5–6.5 nL/min. |
| 關鍵字 | |
| 語言 | en |
| ISSN | 0167-9317 |
| 期刊性質 | 國外 |
| 收錄於 | SCI EI |
| 產學合作 | |
| 通訊作者 | Yang, Lung-Jieh |
| 審稿制度 | 否 |
| 國別 | NLD |
| 公開徵稿 | |
| 出版型式 | ,紙本 |
| 相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/60552 ) |
| SDGS | 優質教育 |
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