教師資料查詢 | 類別: 期刊論文 | 教師: 趙崇禮 CHAO CHOUNG-LII (瀏覽個人網頁)

標題:Investigation of Thermo-Chemical Polishing of CVD Diamond Film
學年95
學期1
出版(發表)日期2007/01/01
作品名稱Investigation of Thermo-Chemical Polishing of CVD Diamond Film
作品名稱(其他語言)
著者Chao, C.L.; Chien, H.H.; Ma, K.J.; Lin, H.Y.
單位淡江大學機械與機電工程學系
出版者
著錄名稱、卷期、頁數Key Engineering Materials 329, pp.195-200
摘要ZnO/Diamond structure has attracted a lot of attentions and heavy investment recently just because diamond has the capability of producing very high surface acoustic wave (around 10,000m/s). In this present study, the microwave chemical vapor deposition (CVD) method was employed to produce diamond films on silicon single crystal. Thermo-chemical polishing experiments were then conducted on the obtained diamond films. The underlying material removal mechanisms, microstructure of the machined surface and related machining conditions were also investigated. Thermo-chemical polishing was proved to be able to remove the diamond film very effectively (4.8μm deep of diamond film was removed in 30 minutes when polishing at 550oC and 5.7m/s). The material removal rate was increased with polishing speed and pressure. Higher polishing temperature would improve the chemical reaction and result in better surface finish.
關鍵字Chemical Vapor Deposition (CVD);Diamond Film;Thermo-Chemical Polishing
語言英文
ISSN1662-9795;1013-9826
期刊性質國外
收錄於
產學合作
通訊作者
審稿制度
國別瑞士
公開徵稿
出版型式,電子版,紙本
相關連結
Google+ 推薦功能,讓全世界都能看到您的推薦!