SU-8 buckled-type microvalves switched by surface tension forces
學年 95
學期 1
發表日期 2007-01-16
作品名稱 SU-8 buckled-type microvalves switched by surface tension forces
作品名稱（其他語言）
著者 Yang, Lung-jieh; Liu, Kuan-chun
作品所屬單位 淡江大學機械與機電工程學系
出版者 N.Y.: IEEE (Institute of Electrical and Electronic Engineers)
會議名稱 Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on
會議地點 Bangkok, Thailand
摘要 This paper presents the design, the fabrication, and the measurement result of a novel buckled-type microvalve. This device comprises of a parylene microtube for liquid transportation and a peacock-like SU-8 capillary microstructure for switching the microvalve without external power source. The maximal spreading angles of the peacock-like structures actuated by water surface tension are experimentally tested as 204deg and 15deg for the cases of not integrating and integrating a parylene microtube, respectively.
關鍵字
語言 en
收錄於 EI
會議性質 國際
校內研討會地點
研討會時間 20070116~20070119
通訊作者
國別 THA
公開徵稿
出版型式
出處 Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on, pp.105-108
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