教師資料查詢 | 類別: 會議論文 | 教師: 楊龍杰 Yang Lung-jieh (瀏覽個人網頁)

標題:SU-8 buckled-type microvalves switched by surface tension forces
學年95
學期1
發表日期2007/01/16
作品名稱SU-8 buckled-type microvalves switched by surface tension forces
作品名稱(其他語言)
著者Yang, Lung-jieh; Liu, Kuan-chun
作品所屬單位淡江大學機械與機電工程學系
出版者N.Y.: IEEE (Institute of Electrical and Electronic Engineers)
會議名稱Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on
會議地點Bangkok, Thailand
摘要This paper presents the design, the fabrication, and the measurement result of a novel buckled-type microvalve. This device comprises of a parylene microtube for liquid transportation and a peacock-like SU-8 capillary microstructure for switching the microvalve without external power source. The maximal spreading angles of the peacock-like structures actuated by water surface tension are experimentally tested as 204deg and 15deg for the cases of not integrating and integrating a parylene microtube, respectively.
關鍵字
語言英文
收錄於EI
會議性質國際
校內研討會地點
研討會時間20070116~20070119
通訊作者
國別泰國
公開徵稿
出版型式
出處Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on, pp.105-108
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