教師資料查詢 | 類別: 會議論文 | 教師: 楊龍杰 Yang Lung-jieh (瀏覽個人網頁)

標題:Gas permeation in PDMS monitored by on-site pressure sensors
學年98
學期1
發表日期2010/01/20
作品名稱Gas permeation in PDMS monitored by on-site pressure sensors
作品名稱(其他語言)
著者Yang, Lung-Jieh; Kao, A-Fu
作品所屬單位淡江大學機械與機電工程學系
出版者Institute of electrical and electronics engineers (IEEE)
會議名稱Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on
會議地點Xiamen, China
摘要This paper proposes a new methodology to detect the gas-leakage and the corresponding diffusion coefficient of PDMS. The authors use PDMS instead of Pyrex #7740 glass to seal the backside V-grooves of pressure sensor chips. The packaged sensor is put into a pressure testing machine and pressurized with CO2 at 300 psi. By observing the output voltage, the time history for CO2 permeating into cavity of the sensor was easily to be found. In this paper, the authors use several PDMS membranes with different thickness, from 45 to 2000 弮m, to package the sensors and investigate the gas-leakage of PDMS. The gas leaking through PDMS is shown to be governed by the diffusion mechanism, and the diffusion coefficients derived from CO2 leaking history of PDMS chip frames is 2.2?10-9 m /s, matched with the previous work. The thickness effect of PDMS on the diffusion mechanism is also addressed.
關鍵字CO2;PDMS;permeation;pressure sensor
語言英文
收錄於EI
會議性質國際
校內研討會地點
研討會時間20100120~20100123
通訊作者
國別中國
公開徵稿Y
出版型式
出處Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on, pp.352-355
相關連結
Google+ 推薦功能,讓全世界都能看到您的推薦!