教師資料查詢 | 類別: 期刊論文 | 教師: 林諭男 I-nan Lin (瀏覽個人網頁)

標題:Effect of N2 addition in Ar plasma on the development of microstructure of ultra-nanocrystalline diamond films
學年98
學期2
出版(發表)日期2010/02/01
作品名稱Effect of N2 addition in Ar plasma on the development of microstructure of ultra-nanocrystalline diamond films
作品名稱(其他語言)
著者Wang, Chuan-Sheng; Tong, Ging-Horng; Chen, Huang-Chin; Shih, Wen-Ching; Lin, I-Nan
單位淡江大學物理學系
出版者Lausanne: Elsevier S.A.
著錄名稱、卷期、頁數Diamond and Related Materials 19(2–3), pp.147–152
摘要The effect of the N2 and H2 addition in Ar plasma on the characteristics of the UNCD films was systematically investigated. It is found that, while the N2/Ar plasma results in UNCD films with ultra-small grains (~ 5 nm), incorporation of H2 into the N2/Ar plasma increased monotonously the size of the grains. Moreover, the diamond grains synthesized in H2 free plasma are of equi-axed geometry and those grown in H2-containing plasma are of plate-like one. The optical emission spectroscopic investigation indicated that the increase in electron temperature due to the addition of H2 into Ar plasma is the main cause, altering the microstructure of the UNCD films. As the H2 content increases, the spherical diamond grains first agglomerated to form elongated grains, which coalesce to form dendrite clusters. The proportion of grain boundaries is thus decreased that increased the turn-on field necessary for inducing the electron field emission process.
關鍵字UNCD; TEM; N2/Ar plasma
語言英文
ISSN0925-9635
期刊性質國外
收錄於SCI
產學合作
通訊作者Lin, I-Nan
審稿制度
國別瑞士
公開徵稿
出版型式紙本
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