教師資料查詢 | 類別: 期刊論文 | 教師: 林諭男 I-nan Lin (瀏覽個人網頁)

標題:Substrate temperature effects on the electron field emission properties of nitrogen doped ultra-nanocrystalline diamond
學年96
學期2
出版(發表)日期2008/04/01
作品名稱Substrate temperature effects on the electron field emission properties of nitrogen doped ultra-nanocrystalline diamond
作品名稱(其他語言)
著者Chen, Y. C.; Tai, N. H.; 林諭男; Lin, I. N.
單位淡江大學物理學系
出版者Elsevier
著錄名稱、卷期、頁數Diamond and Related Materials 17(4-5), pp.457-461
摘要For the purpose of improving the electron field emission properties of ultra-nanocrystalline diamond (UNCD) films, nitrogen species were doped into UNCD films by microwave plasma chemical vapor deposition (MPCVD) process at high substrate temperature ranging from 600° to 830 °C, using 10% N2 in Ar/CH4 plasma. Secondary ion mass spectrometer (SIMS) analysis indicates that the specimens contain almost the same amount of nitrogen, regardless of the substrate temperature. But the electrical conductivity increased nearly 2 orders of magnitude, from 1 to 90 cm− 1 Ω− 1, when the substrate temperature increased from 600° to 830 °C. The electron field emission properties of the films were also pronouncedly improved, that is, the turn-on field decreased from 20 V/μm to 10 V/μm and the electron field emission current density increased from less than 0.05 mA/cm2 to 15 mA/cm2. The possible mechanism is presumed to be that the nitrogen incorporated in UNCD films are residing at grain boundary regions, converting sp3-bonded carbons into sp2-bonded ones. The nitrogen ions inject electrons into the grain boundary carbons, increasing the electrical conductivity of the grain boundary regions, which improves the efficiency for electron transport from the substrate to the emission sites, the diamond grains.
關鍵字
語言英文
ISSN0925-9635
期刊性質國外
收錄於
產學合作
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審稿制度
國別瑞士
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