教師資料查詢 | 類別: 期刊論文 | 教師: 林諭男 I-nan Lin (瀏覽個人網頁)

標題:Synthesis and characterization of smooth ultrananocrystalline diamond films via low pressure bias-enhanced nucleation and growth
學年96
學期2
出版(發表)日期2008/03/01
作品名稱Synthesis and characterization of smooth ultrananocrystalline diamond films via low pressure bias-enhanced nucleation and growth
作品名稱(其他語言)
著者Chen, Y. C.; Zhong, X. Y.; Konicek, A. R.; Grierson, D. S.; Tai, N. H.; 林諭男; Lin, I. N.; Kabius, B.; Hiller, J. M.; Sumant, A. V.; Carpick, R. W.; Auciello, O.
單位淡江大學物理學系
出版者American Institute of Physics (AIP)
著錄名稱、卷期、頁數Applied Physics Letters 92(13), pp.133113(3 pages)
摘要This letter describes the fundamental process underlying the synthesis of ultrananocrystalline diamond (UNCD) films, using a new low-pressure, heat-assisted bias-enhanced nucleation (BEN)/bias enhanced growth (BEG) technique, involving H2/CH4 gas chemistry. This growth process yields UNCD films similar to those produced by the Ar-rich/CH4 chemistries, with pure diamond nanograins (3–5 nm), but smoother surfaces (~6 nm rms) and higher growth rate (~1 µm/h). Synchrotron-based x-Ray absorption spectroscopy, atomic force microscopy, and transmission electron microscopy studies on the BEN-BEG UNCD films provided information critical to understanding the nucleation and growth mechanisms, and growth condition-nanostructure-property relationships.
關鍵字atomic force microscopy; diamond; heat treatment; nanostructured materials; nanotechnology; nucleation; transition electron microscopy; XANES
語言英文
ISSN0003-6951
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