教師資料查詢 | 類別: 期刊論文 | 教師: 林諭男 I-nan Lin (瀏覽個人網頁)

標題:Optical properties of Pb(Zr,Ti)O[sub 3] thin films on sapphire prepared by metalorganic decomposition process
學年92
學期1
出版(發表)日期2003/11/10
作品名稱Optical properties of Pb(Zr,Ti)O[sub 3] thin films on sapphire prepared by metalorganic decomposition process
作品名稱(其他語言)
著者Kao, Chien-kang; Tsai, Chuen-horng; Lin, I-nan
單位淡江大學物理學系
出版者American Institute of Physics (AIP)
著錄名稱、卷期、頁數Applied Physics Letters 83(19), pp.3915-3917
摘要Pb~Zr0.52Ti0.48)O3 ~PZT! thin films were synthesized on a sapphire substrate for application as planar optical waveguide devices using a metalorganic decomposition ~MOD! process. Pyrochlore phase, which always forms preferentially when the PZT thin films ~;200 nm! are deposited on a sapphire substrate directly, has been effectively suppressed by using a SrTiO3 ~STO! film ~;190 nm! as a buffer layer. The PZT/sapphire thin films have a significantly larger refractive index than the STO/sapphire ones: nPZT52.2012 and nSTO52.0639 ~at 632.8 nm! by prism coupling measurement and nPZT 8 52.215 and nSTO 8 52.084 ~at 632.8 nm! by optical transmission spectroscopic
measurement. The STO layer cannot only serve as buffer layer for enhancing the crystallization kinetics of the subsequently deposited PZT thin films, but can also serve as cladding layer in a ridge-type planar waveguide, which uses PZT thin film as core materials.
關鍵字
語言英文
ISSN0003-6951
期刊性質國內
收錄於
產學合作
通訊作者Tsai, Chuen-horng
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國別
公開徵稿
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