Correlation between electron field emission property and in situ plasma spectroscopy for carbon nanotubes synthesized by using MPECVD method
學年 94
學期 2
出版(發表)日期 2006-04-01
作品名稱 Correlation between electron field emission property and in situ plasma spectroscopy for carbon nanotubes synthesized by using MPECVD method
作品名稱(其他語言)
著者 Cheng, Hsiu-fung; 鄭秀鳳; Li, Chen-liang; Chen, Yu-wen; 林諭男; Lin, I-nan
單位 淡江大學物理學系
出版者 Lausanne: Elsevier S.A.
著錄名稱、卷期、頁數 Diamond and Related Materials 15(4-8), pp.859-862
摘要 Carbon nanotubes (CNTs) were grown on Fe needle by a modified microwave plasma enhanced chemical vapor deposition (MPECVD) process, in which the plasma was induced in the vicinity of the tip of Fe needle through the interaction of microwave and Fe needles. The spectra of plasma were in situ examined, indicating that Ar / CH4 ratio and total pressure remarkably affect the characteristics of the plasma spectra, which, in turn, correlated intimatedly with the electron field emission properties of CNTs. The presence of singly ionized carbons (CII) in the plasma is presumed to be the main factor facilitating the growth of CNTs, possessing good electron field emission properties. The maximum electron field emission current density is 8 mA/cm2 for carbon nanotubes grown at 10% CH4 and 300 Torr total pressure. The corresponding turn-on field (Eo) is 20 V/μm. Restated, the electron field emission properties of CNTs can be optimized by controlling the spectral characteristics of plasma.
關鍵字 Carbon nanotubes; Electron field emission; MPECVD; In situ plasma spectroscopy
語言 en
ISSN 0925-9635
期刊性質 國外
收錄於
產學合作
通訊作者
審稿制度
國別 CHE
公開徵稿
出版型式 電子版
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