教師資料查詢 | 類別: 期刊論文 | 教師: 林諭男 I-nan Lin (瀏覽個人網頁)

標題:Comparative study of nucleation processes for the growth of nanocrystalline diamond
學年94
學期2
出版(發表)日期2006/02/01
作品名稱Comparative study of nucleation processes for the growth of nanocrystalline diamond
作品名稱(其他語言)
著者劉彥崗; Liu, Y. K.; Tso, P. L.; 林諭男; Lin, I-nan; Tzeng, Y.; Chen, Y. C.
單位淡江大學物理學系
出版者Elsevier
著錄名稱、卷期、頁數Diamond and Related Materials 15(2-3), pp.234-238
摘要Methods for seeding silicon substrates with pretreatments and the in situ generation of diamond nuclei by the bias enhanced nucleation (BEN) have been studied to examine their effects on the nucleation density as well as the morphology of grown and seeded sides, the growth rate, and the quality of nanocrystalline diamond films. Pretreatments including mechanical abrasion by diamond paste, exposure of the silicon substrate to a hydrocarbon plasma, and ultrasonication of silicon in solvents with suspended nano- or micro-diamond powders were studied. With an optimized diamond seeding or nucleation process, ultra-thin, smooth and homogenous nanocrystalline diamond films can be fabricated.
關鍵字Nanocrystalline diamond;NCD;Nucleation;MPCVD
語言英文
ISSN0925-9635
期刊性質國內
收錄於
產學合作
通訊作者
審稿制度
國別中華民國
公開徵稿
出版型式,電子版
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