教師資料查詢 | 類別: 期刊論文 | 教師: 林諭男 I-nan Lin (瀏覽個人網頁)

標題:Characteristics of ZnO thin film surface acoustic wave devices fabricated using nanocrystalline diamond film on silicon substrates
學年96
學期2
出版(發表)日期2008/03/01
作品名稱Characteristics of ZnO thin film surface acoustic wave devices fabricated using nanocrystalline diamond film on silicon substrates
作品名稱(其他語言)
著者Shih, Wen-ching; Wang, Mao-jin; 林諭男; Lin, I-nan
單位淡江大學物理學系
出版者Elsevier
著錄名稱、卷期、頁數Diamond and Related Materials 17(3), pp.390-395
摘要The propagation characteristics of surface acoustic wave for the ZnO piezoelectric films and nanocrystalline diamond (NCD) films multilayer SAW devices on Si substrates were investigated. High surface acoustic wave velocity is achieved for a ZnO/NCD/Si multilayer structure excited by a bottom-electroded device configuration. The NCD films deposited on Si substrates (NCD/Si) not only possess smooth surface, but also show good compatibility with ZnO materials, such that [002] textured ZnO films can be directly grown on NCD/Si substrates without the necessity of using buffer layer. The surface acoustic wave velocity increased with the thickness of the NCD films. For the thickness of the ZnO and NCD films investigated, the 0th mode surface acoustic velocity in IDT/ZnO/NCD/Si structure achieves 5100 m/s, whereas the 1st mode SAW in the ZnO/IDT/NCD/Si structure reaches 8500 m/s.
關鍵字Nanocrystalline diamond;Surface acoustic wave devices;High frequency electronics;Sputtering
語言英文
ISSN0925-9635
期刊性質國內
收錄於
產學合作
通訊作者
審稿制度
國別中華民國
公開徵稿
出版型式,電子版
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