教師資料查詢 | 類別: 期刊論文 | 教師: 林諭男 I-nan Lin (瀏覽個人網頁)

標題:Adhesion properties of nitrogen ion implanted ultra-nanocrystalline diamond films on silicon substrate
學年96
學期2
出版(發表)日期2008/04/01
作品名稱Adhesion properties of nitrogen ion implanted ultra-nanocrystalline diamond films on silicon substrate
作品名稱(其他語言)
著者Palnitkar, U. A.; Joseph, P. T.; Niu, H.; Huang, H. Y.; Fang, W. L.; Cheng, H. F.; Tai, N. H.; 林諭男; Lin, I-nan
單位淡江大學物理學系
出版者Elsevier
著錄名稱、卷期、頁數Diamond and Related Materials 17(4-5), pp.864-867
摘要Ultra-nanocrystalline diamond (UNCD) films prepared by microwave plasma enhanced chemical vapor deposition were implanted using 0.3 MeV nitrogen ions under a dose of 1013, 1014, and 1015 ions cm− 2. While the surface morphology of the UNCD films was not pronounced modified, the crystallinity of the films was changed appreciably due to ion implantation. The scratch test has been used to study the adhesion of the film to the substrate, which illustrated that the critical load, used as a measure of the adhesive strength, is found to increase with ion dose. Secondary ion mass spectroscopy (SIMS) analyses on the interfacial morphology indicated that the main factor in improving the adhesive strength is the modification on interfacial structure through inter-diffusion between film and substrate.
關鍵字UNCD; Adhesion; Ion implantation; Interface structure
語言英文
ISSN0925-9635
期刊性質國內
收錄於
產學合作
通訊作者
審稿制度
國別中華民國
公開徵稿
出版型式,電子版
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