教師資料查詢 | 類別: 期刊論文 | 教師: 彭維鋒 Pong, Way-faung (瀏覽個人網頁)

標題:Comparison of electronic structures of RuO2 and IrO2 nanorods investigated by x-ray absorption and scanning photoelectron microscopy
學年95
學期1
出版(發表)日期2007/01/22
作品名稱Comparison of electronic structures of RuO2 and IrO2 nanorods investigated by x-ray absorption and scanning photoelectron microscopy
作品名稱(其他語言)
著者Tsai, H. M.; Babu, P. D.; Pao, C. W.; Chiou, J. W.; Jan, J. C.; Krishna Kumar, K. P.; 錢凡之; Chien, F. Z.; 彭維鋒; Pong, Way-faung; Tsai, M. H.; Chen, C. H.; Jang, L. Y.; Lee, J. F.; Chen, R. S.; Huang, Y. S.; Tsai, D. S.
單位淡江大學物理學系
出版者American Institute of Physics (AIP)
著錄名稱、卷期、頁數Applied Physics Letters 91(4), pp.042108
摘要Through-wafer interconnects by aligned carbon nanotube for three-dimensional stack integrated
chip packaging applications have been reported in this letter. Two silicon wafers are bonded together
by tetra-ethyl-ortho-silicate. The top wafer 100 m thick with patterned through-holes allows
carbon nanotubes to grow vertically from the catalyst layer Fe on the bottom wafer. By using
thermal chemical vapor deposition technique, the authors have demonstrated the capability of
growing aligned carbon nanotube bundles with an average length of 140 m and a diameter of
30 m from the through holes. The resistivity of the bundles is measured to be 0.0097 cm by
using a nanomanipulator.
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語言英文
ISSN0003-6951
期刊性質國內
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