關鍵字查詢 | 類別:期刊論文 | | 關鍵字:Microstructure and electronic properties of ultra-nano-crystalline-diamond thin films

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1 108/2 物理系 彭維鋒 教授 期刊論文 發佈 Microstructure and electronic properties of ultra-nano-crystalline-diamond thin films , [108-2] :Microstructure and electronic properties of ultra-nano-crystalline-diamond thin films期刊論文Microstructure and electronic properties of ultra-nano-crystalline-diamond thin filmsR.W. Thoka; S.J. Moloi; Sekhar C. Ray; W. F. Pong; I.-N. LinUNCD;Raman spectroscopy;Hardness/Young’s modulus;XPS/UPSJournal of Electron Spectroscopy and Related Phenomena 242, 146968Ultra-nano-crystalline diamond (UNCD) thin films with average thickness ∼200 nm, were grown on n-type mirror polished silicon (100) substrates using microwave plasma enhanced chemical vapour deposition system in different gas (H2 - N2 - Ar - CH4) composition plasma atmospheres at 1200 W (2.45 GHz) and in a pressure of 120 Torr with plasma-temperature ∼475 °C. Raman spectroscopy was used for microstructural study and nano-indentation was used for Hardness/Young’s modulus study; whereas X-ray absorption near edge structure, X-ray photoelectron and ultraviolet photoemission spectroscopies were used for electronic structure of UNCD thin fil
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