期刊論文
| 學年 | 114 |
|---|---|
| 學期 | 1 |
| 出版（發表）日期 | 2025-11-18 |
| 作品名稱 | Development of vacuum-chamber-type capacitive micro-pressure sensors |
| 作品名稱（其他語言） | |
| 著者 | Lung-Jieh Yang; De-Yu Jiang; Wei-Chen Wang; Chandrashekhar Tasupalli; Horng-Yuan Shih; Yi-Jen Wang |
| 單位 | |
| 出版者 | |
| 著錄名稱、卷期、頁數 | Micromachines 16(11) ,p.1290 |
| 摘要 | This study presents the development of a capacitive pressure sensor tailored for measuring the dynamic pressure of flow fields. The sensor is fabricated using the UMC 0.18 µm CMOS-MEMS process, incorporated with additional post-processing steps such as metal wet etching, supercritical CO2 drying, and parylene encapsulation. The sensing architecture employs AD7746 as a capacitance-to-voltage converter (CVC), enabling the conversion of capacitance signals into voltage outputs for enhanced measurement fidelity. Structurally, the capacitive pressure sensor features a vacuum-sealed diaphragm capsule design with dual movable circular membranes functioning as sensing electrodes. A contact-mode capacitive configuration with a trapezoidal or Gong-like vacuum-chamber diaphragm is adopted to improve linearity and sensitivity. The output sensitivity was determined to be feasible for measuring dynamic pressure at 1–2 Pa resolution. |
| 關鍵字 | capacitive pressure sensor;complementary metal oxide semiconductor (CMOS);vacuum chamber |
| 語言 | en |
| ISSN | 2072-666X |
| 期刊性質 | 國外 |
| 收錄於 | SCI Scopus |
| 產學合作 | |
| 通訊作者 | Lung-Jieh Yang |
| 審稿制度 | 是 |
| 國別 | CHE |
| 公開徵稿 | |
| 出版型式 | ,電子版 |
| 相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/128262 ) |