期刊論文
| 學年 | 106 |
|---|---|
| 學期 | 1 |
| 出版（發表）日期 | 2017-09-28 |
| 作品名稱 | Single step sequential polydimethylsiloxane wet etching to fabricate a microfluidic channel with various cross-sectional geometries |
| 作品名稱（其他語言） | |
| 著者 | Chien-Kai Wang; Wei-Hao Liao; Hsiao-Mei Wu; Yuan-Hsiu Lo; Ting-Ru Lin; Yi-Chung Tung |
| 單位 | |
| 出版者 | |
| 著錄名稱、卷期、頁數 | Journal of Micromechanics and Microengineering 27(11), 115003 (9 pages) |
| 摘要 | Polydimethylsiloxane (PDMS) has become a widely used material to construct microfluidic devices for various biomedical and chemical applications due to its desired material properties and manufacturability. PDMS microfluidic devices are usually fabricated using soft lithography replica molding methods with master molds made of photolithogrpahy patterned photoresist layers on silicon wafers. The fabricated microfluidic channels often have rectangular cross-sectional geometries with single or multiple heights. In this paper, we develop a single step sequential PDMS wet etching process that can be used to fabricate microfluidic channels with various cross-sectional geometries from a single-layer PDMS microfluidic channels. The cross-sections of the fabricated channel can be non-rectangular, and varied along the flow direction. Furthermore, the fabricated cross-sectional geometries can be numerically simulated beforehand. In the experiments, we fabricate microfluidic channels with various cross-sectional geometries using the developed technique. In addition, we fabricate a microfluidic mixer with alternative mirrored cross-sectional geometries along the flow direction to demonstrate practical usage of the developed technique. |
| 關鍵字 | polydimethylsiloxane;wet etching;microfluidics |
| 語言 | en |
| ISSN | 0960-1317 |
| 期刊性質 | 國外 |
| 收錄於 | SCI |
| 產學合作 | |
| 通訊作者 | Chien-Kai Wang and Yi-Chung Tung |
| 審稿制度 | 是 |
| 國別 | GBR |
| 公開徵稿 | |
| 出版型式 | ,電子版,紙本 |
| 相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/111949 ) |