期刊論文
| 學年 | 103 |
|---|---|
| 學期 | 2 |
| 出版（發表）日期 | 2015-07-15 |
| 作品名稱 | Studies on Surface Tension Influenced Critical Gap in Cantilever Microstructures |
| 作品名稱（其他語言） | |
| 著者 | 楊龍杰; Marimuthu, Suseendar |
| 單位 | 淡江大學機械與機電工程學系 |
| 出版者 | Cambridge University Press |
| 著錄名稱、卷期、頁數 | Journal of Mechanics, 32(1), pp.19-24 |
| 摘要 | This note presents an elasto-capillary model of a cantilever subject to capillary stiction during drying process of removing sacrificial layers in MEMS. Similar to the dynamic analysis of the electrostatic pull-in of electrostatic micro actuators, the cantilever beam tends to be pulled down to the substrate due to the nonlinear capillary force with respect to the gap. The critical one-half gap deformation and the corresponding critical wetting area for pulling down a micro cantilever by surface tension are analytically found herein. The instability situation of a generalized critical deformation for power-law surface force with respect to gap is also predicted accordingly. Some prior MEMS works are exemplified to justify this critical one-half gap deformation for capillary stiction. |
| 關鍵字 | Stiction;Surface tension;Cantilever;Critical gap |
| 語言 | en |
| ISSN | 1727-7191 |
| 期刊性質 | 國外 |
| 收錄於 | SCI |
| 產學合作 | |
| 通訊作者 | 楊龍杰 |
| 審稿制度 | 否 |
| 國別 | GBR |
| 公開徵稿 | |
| 出版型式 | ,電子版,紙本 |
| 相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/103392 ) |