期刊論文
學年 | 86 |
---|---|
學期 | 2 |
出版(發表)日期 | 1998-07-01 |
作品名稱 | Characteristics of proton-exchanged wet etching on z-cut nickel-indiffused lithium niobate |
作品名稱(其他語言) | |
著者 | 張文清; Chang, Wen-ching; Chang, Shih-jung; Sue, Chao-yung; Hsu, Chia-lu |
單位 | 淡江大學電機工程學系 |
出版者 | Wiley-Blackwell |
著錄名稱、卷期、頁數 | Microwave and optical technology letters 18(4), pp.250-252 |
摘要 | In this letter, the wet etching technique is utilized to determine the proton exchange (PE) depth of z-cut nickel-indiffused lithium niobate under different nickel indiffusion parameters. It is demonstrated that the existence of nickel atoms reduces the PE depth. While this result was applied to the fabrication of a ridge-type waveguide, the tilt angle of the sidewall on the ridge waveguide was about 70°, which has been successfully increased. © 1998 John Wiley & Sons, Inc. Microwave Opt Technol Lett 18: 250–252, 1998. |
關鍵字 | |
語言 | en |
ISSN | 0895-2477 |
期刊性質 | 國內 |
收錄於 | |
產學合作 | |
通訊作者 | |
審稿制度 | 否 |
國別 | TWN |
公開徵稿 | |
出版型式 | ,電子版 |
相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/46382 ) |