期刊論文
| 學年 | 93 |
|---|---|
| 學期 | 1 |
| 出版（發表）日期 | 2004-08-01 |
| 作品名稱 | Fabrication of SU-8 embedded microchannels with circular cross-section |
| 作品名稱（其他語言） | |
| 著者 | Yang, Lung-jieh; Chen, Yu-tang; Kang, Shung-wen; Wang, Yi-chung |
| 單位 | 淡江大學機械與機電工程學系 |
| 出版者 | Elsevier |
| 著錄名稱、卷期、頁數 | International journal of machine tools and manufacture 44(10), pp.1109-1114 |
| 摘要 | This paper proposes a novel technique for fabricating microchannels in SU-8 by inserting optical-fibers as sacrificial moulds. The embedded circular microchannels, with inner diameters of 36, 80, and 125 μm (i.e., the diameters of optical-fibers), have been made successfully using a low-temperature fabrication process; where the SU-8 transparent negative-bone photo-resist is selected as the structure layer built in multilayers. Additionally, low-cost ultraviolet is applied as the exposure source to pattern the thin film photo-resist. Preliminary results show that the microchannels fabricated with the proposed technique have an average surface roughness (Ra) of the inner wall less than 10 nm and roundness deviation less than 7%. This paper also discusses the wetting behavior of the SU-8 surfaces before and after dipping in the hydrofluoric acid, and summarizes the relationship between the etching rate of sacrificial optical-fibers, etching temperature, concentration, and channel size. Finally, the etching rate of sacrificial optical-fibers vs. etching temperature subject to different concentrations and channel sizes is summarized and explained. This new fabrication technique of microchannel manufacture provides a new approach in selecting SU-8 for the structure material containing microchannels. |
| 關鍵字 | SU-8 microchannels;Optical-fibers;Surface roughness;Roundness deviations;Wetting behaviors;Etching rate |
| 語言 | en |
| ISSN | 0890-6955 |
| 期刊性質 | 國內 |
| 收錄於 | |
| 產學合作 | |
| 通訊作者 | |
| 審稿制度 | 否 |
| 國別 | TWN |
| 公開徵稿 | |
| 出版型式 | ,電子版 |
| 相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/45807 ) |