期刊論文
學年 | 91 |
---|---|
學期 | 1 |
出版(發表)日期 | 2002-10-01 |
作品名稱 | Fabrication and test of radial grooved micro heat pipes |
作品名稱(其他語言) | |
著者 | 康尚文; Kang , Shung-wen; Tsai, Sheng-hong; Chen, Hong-chih |
單位 | 淡江大學機械與機電工程學系 |
出版者 | Elsevier |
著錄名稱、卷期、頁數 | Applied thermal engineering 22(14), pp.1559-1568 |
摘要 | This paper describes the development of radial grooved micro heat pipes (MHPs) with a three-layer structure. The MHPs were designed to allow separation of the liquid and vapor flow to reduce the viscous shear force. The 5×5 cm2 MHP array was fabricated by using bulk micromachining and eutectic bonding techniques on 4-in. (1 0 0) silicon wafers. Experiments were undertaken to evaluate the performance of wafers with three different wafer fill rates at different input powers. We glued a heater below the evaporator section, pumped cold water through a square copper heat exchanger above the heat pipe, and pasted 15 K-type thermocouples on both sides of MHP structure to record the variations of surface temperature. After the evaluation, the MHP with 70% fill rate showed the best performance as compared to samples with smaller fill rates. |
關鍵字 | Micro heat pipe;Bulk micromachining;Eutectic bonding |
語言 | en |
ISSN | 1359-4311 |
期刊性質 | 國內 |
收錄於 | |
產學合作 | |
通訊作者 | |
審稿制度 | 否 |
國別 | TWN |
公開徵稿 | |
出版型式 | ,電子版 |
相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/45665 ) |