期刊論文
| 學年 | 100 |
|---|---|
| 學期 | 1 |
| 出版（發表）日期 | 2012-01-01 |
| 作品名稱 | Fabricating microstructures on CVD diamond film |
| 作品名稱（其他語言） | |
| 著者 | Chao, Choung-Lii; Chou, Wen-Chen; Lin, Wen-Chung; Su, Wei-Jhe; Ma, Kung-Jeng |
| 單位 | 淡江大學機械與機電工程學系 |
| 出版者 | Olney: Inderscience Publishers |
| 著錄名稱、卷期、頁數 | International Journal of Surface Science and Engineering 6(1/2), pp.59-70 |
| 摘要 | Diamond has many advanced properties which may provide potential solutions to various engineering problems. This study focuses on fabricating micro-structures on CVD diamond film. A thin layer of Au or Pt together with thermal annealing process is used to form micro–masks and reactive ion etching (RIE) method was subsequently adopted in this research to etch and fabricate micro–structures. Field emission scanning electron microscope (FESEM) and micro Raman spectroscopy were used to observe and analyse the morphology and composition of the obtained microstructures. Results show that different coated materials and thickness can produce different types of micro–masks and, as a consequence, different microstructures. Depending on the micro–mask, whisker–like or pillar–like microstructures are successfully produced and, based on the micro Raman spectrum; these microstructures still retains good diamond quality. |
| 關鍵字 | CVD diamond film; thermal annealing; reactive ion etching; RIE; microstructure |
| 語言 | en |
| ISSN | 1749-785X; 1749-7868 |
| 期刊性質 | 國外 |
| 收錄於 | SCI |
| 產學合作 | |
| 通訊作者 | Chao, Choung–Lii |
| 審稿制度 | 是 |
| 國別 | GBR |
| 公開徵稿 | |
| 出版型式 | 紙本 |
| 相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/89052 ) |