期刊論文
| 學年 | 90 |
|---|---|
| 學期 | 1 |
| 出版（發表）日期 | 2001-12-01 |
| 作品名稱 | Phase synchronization of micro-mirror arrays using elastic linkages |
| 作品名稱（其他語言） | |
| 著者 | Yang, Lung-Jieh; Liu, Chih-Wei; Chang, Peizen |
| 單位 | 淡江大學機械與機電工程學系 |
| 出版者 | Lausanne: Elsevier S.A. |
| 著錄名稱、卷期、頁數 | Sensors and Actuators, A: Physical 95(1), pp.55-60 |
| 摘要 | This paper investigates phase synchronization and concordant resonance of micro-mirror arrays and describes in detail a proposed design for a segmented micro-mirror with elastic linkages. The device replaces a conventional large area mirror, thus increasing the working frequency and allowing micro-mirror arrays to induce smaller vibration amplitude. The torsional micro-mirror array is fabricated using three conventional masks based on silicon bulk-micromachining technology. Experimental results of the prototype sample show that the phase difference among the mirror segments of the mirror array is below 1/15 cycle. |
| 關鍵字 | Elasticity;Microelectromechanical devices;Micromachining;Resonance;Synchronization;Vibrations (mechanical);Bulk-micromachining;Elastic linkages;Micro-mirror arrays;Phase synchronization;Mirrors |
| 語言 | en |
| ISSN | 0924-4247 |
| 期刊性質 | 國外 |
| 收錄於 | SCI EI |
| 產學合作 | |
| 通訊作者 | Yang, Lung-Jieh |
| 審稿制度 | |
| 國別 | SWZ |
| 公開徵稿 | |
| 出版型式 | 紙本 |
| 相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/45828 ) |