期刊論文
| 學年 | 87 |
|---|---|
| 學期 | 1 |
| 出版（發表）日期 | 1998-10-01 |
| 作品名稱 | Electronic and atomic structures of the Si-C-N thin film by x-ray-absorption spectroscopy and theoretical calculations |
| 作品名稱（其他語言） | |
| 著者 | Chang, Y. K.; Hsieh, H. H.; Pong, Way-faung; Tsai, M.-H.; Lee, K. H.; Dann, T. E.; Chien, F. Z.; Tseng, P. K.; Tsang, K. L.; Su, W. K.; Chen, L. C.; Wei, S. L.; Chen, K. H.; Bhusari, D. M.; Chen, Y. F. |
| 單位 | 淡江大學物理學系 |
| 出版者 | College Park: American Physical Society |
| 著錄名稱、卷期、頁數 | Physical Review B (Condensed Matter) 58(14), pp.9018-9024 |
| 摘要 | This study measures the x-ray-absorption spectra of a crystalline ~c!-Si-C-N thin film at the C and Si K edge using the sample drain current mode and at the N K edge using the fluorescence mode. A resonance peak resembling the C 1s core exciton in the chemical-vapor-deposition-diamond/Si is observed. In addition, a broad feature is found in the energy range between ;290 and 305 eV, which can be assigned to the antibonding C 2p-Si 3sp hybridized states and the C 2p-N 2sp hybridized states as well. The fact that the resonance peak is located ;1.5 eV below the C 1s ionization energy suggests that the Frenkel-type exciton model can appropriately describe the core exciton of carbon atoms in c-Si-C-N. Closely examining the N K edge near edge absorption spectra reveals similar features in both c-Si-C-N and a-Si3N4, indicating that nitrogen atoms generally have a similar local environment in these two materials. Moreover, results obtained from Si K-edge absorption spectra of c-Si-C-N demonstrate a proportional combination of local Si-N and Si-C bonds associated with the local tetrahedral C-Si-N3 arrangement as well as the long-range ordered atomic structure around Si atoms. Theoretical calculations using the first-principles pseudofunction method are also presented and compared with experimental data. |
| 關鍵字 | |
| 語言 | en |
| ISSN | 0163-1829 1095-3795 |
| 期刊性質 | 國外 |
| 收錄於 | SCI |
| 產學合作 | |
| 通訊作者 | Pong, W. F. |
| 審稿制度 | |
| 國別 | USA |
| 公開徵稿 | |
| 出版型式 | 紙本 電子版 |
| 相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/27776 ) |