會議論文
| 學年 | 95 |
|---|---|
| 學期 | 1 |
| 發表日期 | 2006-11-24 |
| 作品名稱 | A Research on Quick Polishing of CVD Diamond Film |
| 作品名稱（其他語言） | |
| 著者 | 趙崇禮; 周文成; 林夏蓁; 簡川于 |
| 作品所屬單位 | 淡江大學機械與機電工程學系 |
| 出版者 | 中國材料科學學會 |
| 會議名稱 | 2006年中國材料科學學會年會 |
| 會議地點 | 臺南市, 臺灣 |
| 摘要 | Polycrystalline CVD diamond film possesses many outstanding physical and mechanical properties which make it a very important engineering material. However, high hardness value and extreme brittleness have made CVD diamond a very difficult material to be machined by conventional grinding and polishing process. In this present study, the diamond wafer was pre-treated with RIE before it was thermo-chemically polished. It was found when diamond wafer was ion-etched in O2 (25 min, 200W, 50sccm), the top layer pyramidal diamond crystals were anisotropically etched into micro-pillar structures. These micro-pillars have significantly weakened the structure of diamond grains and paved the way for subsequent thermo-chemical polishing. Based on the obtained results, this method has great potential to be applied to speed up the polishing process of CVD diamond films in the future. |
| 關鍵字 | Reactive ion etching;Thermo-chemical polishing;CVD diamond film |
| 語言 | en |
| 收錄於 | |
| 會議性質 | 國內 |
| 校內研討會地點 | 無 |
| 研討會時間 | 20061124~20061125 |
| 通訊作者 | |
| 國別 | TWN |
| 公開徵稿 | Y |
| 出版型式 | 紙本 |
| 出處 | 2006年中國材料科學學會年會論文集, 4p. |
| 相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/70773 ) |