期刊論文
| 學年 | 97 |
|---|---|
| 學期 | 2 |
| 出版（發表）日期 | 2009-02-01 |
| 作品名稱 | Research on Fabricating CVD Diamond Microstructures Using RIE Process |
| 作品名稱（其他語言） | |
| 著者 | Chou, Wen-chen; Chao, Choung-lii; Fan, Wei-haw; Ma, Kung-jeng |
| 單位 | 淡江大學機械與機電工程學系 |
| 出版者 | Stafa-Zurich: Trans Tech Publications Ltd. |
| 著錄名稱、卷期、頁數 | Key Engineering Materials 407-408, pp.41-44 |
| 摘要 | Diamond is one of the most important engineering materials for its extreme hardness, high thermal conductivity value and chemical inertness. Due to its high hardness and strength, it can be ideal candidates for AFM probe or micro-needle. In this research, micro cone-like shaped diamond tips with high aspect ratio formed using reactive ion etching (RIE) method. The scanning electron microscope (SEM), transmission electron microscope (TEM) and micro-Raman spectroscopy were used to study the surface morphology and sub-surface micro-structure before and after RIE process. The results showed that gold could be adopted as mask material during the RIE process. Different microstructures could be obtained using different RIE parameters such as etch duration and reactant gas. After RIE (O2 50sccm, 200W) for 5min the micro cone-like structures (aspect ratio~8) could be observed on the surface if a thin layer of gold was applied as mask. However, under the same RIE conditions, the irregular pillar-like microstructures started to emerge if the etching time was stretched longer. |
| 關鍵字 | CVD Diamond; Mask; Microstructure; RIE |
| 語言 | en |
| ISSN | 1013-9826; 1662-9795 |
| 期刊性質 | 國外 |
| 收錄於 | EI |
| 產學合作 | |
| 通訊作者 | |
| 審稿制度 | 是 |
| 國別 | CHE |
| 公開徵稿 | |
| 出版型式 | 紙本 |
| 相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/65378 ) |