會議論文
| 學年 | 91 |
|---|---|
| 學期 | 1 |
| 發表日期 | 2003-01-19 |
| 作品名稱 | The micro ion drag pump using indium-tin-oxide (ITO) electrodes |
| 作品名稱（其他語言） | |
| 著者 | Yang, Lung-jieh; Wang, Jiun-min; Huang, Yu-lin |
| 作品所屬單位 | 淡江大學機械與機電工程學系 |
| 出版者 | Piscataway: Institute of Electrical and Electronic Engineers (IEEE) |
| 會議名稱 | Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on |
| 會議地點 | Kyoto, Japan |
| 摘要 | This paper describes a micro ion drag pump, or an ejection type electro-hydrodynamic (EHD) micro pump, using Indium-Tin-Oxide (ITO) planar electrodes novelly. The ITO film for the electrodes makes anodic bonding easily and feasible in packaging the glass substrate (with ITO) hermetically with the silicon micro channels. Therefore, the scaling down or the miniaturization of ion drag pumps can be achieved herein. The ITO electrodes could drive the ethyl alcohol to have the maximum volumetric flow rate of 87 nl/min with applying a DC driving voltage of 40 Volts. More efforts and improvements on the pumping efficiency as well as the long-term stability of the ITO electrodes are acquired correspondingly. |
| 關鍵字 | |
| 語言 | en |
| 收錄於 | |
| 會議性質 | 國際 |
| 校內研討會地點 | |
| 研討會時間 | |
| 通訊作者 | |
| 國別 | JPN |
| 公開徵稿 | |
| 出版型式 | |
| 出處 | Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on, pp.112-115 |
| 相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/38058 ) |